원자 탐침 현미경의 기술 발전과 전망

• 영문명: A Comprehensive Review on the Technological Evolution and Perspective of Atom Probe Tomography
• 발행기관: 한국세라믹학회
• 저자명: 유보령(Boryung Yoo) 김세호(Se-Ho Kim)
• 간행물 정보: 『세라미스트』제28권 제2호, 294~309쪽, 전체 16쪽
• 주제분류: 공학 > 화학공학
• 파일형태: PDF
• 발행일자: 2025.06.30

국문 초록

Atom probe tomography (APT) has emerged as a powerful analytical technique capable of reconstructing three-dimensional compositional and structural information at the atomic scale. This paper provides a comprehensive review of the historical development of APT, structured around four key stages: Field emission microscopy, Field Ion Microscopy, Field Desorption Microscopy, and the eventual advent of APT. Foundational work by Erwin Müller laid the groundwork for APT through innovations in electron and ion imaging. The subsequent integration of mass spectrometry and position-sensitive detectors enabled true 3D atomic-scale analysis. We also discuss critical sample preparation methods along with measurement techniques. Furthermore, the paper covers advanced reconstruction algorithms and highlights recent advances in APT instrumentation such as the LEAP 6000 system. This review aims to provide a thorough and practical reference for researchers seeking to understand and apply APT in materials science and related fields.

목차

1. APT 개발의 역사

2. APT 분석

3. APT 장비

4. APT 응용 사례

5. 결론

REFERENCE

키워드

3D reconstruction Atom Probe Tomography Field Evaporation Specimen Preparation Time-of-Flight Mass Spectrometry