전해질 게이트 바이오센서의 감도 향상을 위한 IGZO 전도도 제어 전략

• 영문명: Tuning the Conductivity of IGZO Thin Films for Enhanced Sensitivity in Electrolyte-Gated Biosensors
• 발행기관: 한국세라믹학회
• 저자명: 하영근(Young-Geun Ha)
• 간행물 정보: 『세라미스트』제28권 제2호, 356~364쪽, 전체 9쪽
• 주제분류: 공학 > 화학공학
• 파일형태: PDF
• 발행일자: 2025.06.30

국문 초록

Indium-gallium-zinc oxide (IGZO) semiconductors have gained significant attention for biosensing applications due to their excellent electrical properties, chemical stability, and solution-processability. However, their inherently high conductivity can limit biosensor sensitivity by suppressing current responses to subtle surface charge variations. This study presents a systematic strategy to enhance biosensor sensitivity by tuning the electrical conductivity of IGZO thin films through precursor composition adjustment and annealing temperature control. Electrolyte-gated transistors fabricated with conductivity-optimized IGZO channels exhibited amplified electrical responses to biological interactions, resulting in significantly improved detection sensitivity compared to conventional high-conductivity devices. A glucose sensing experiment further demonstrated that lower conductivity IGZO films led to a fourfold enhancement in sensitivity without requiring complex structural modifications. These findings highlight conductivity engineering as a practical and effective approach to optimize IGZO-based biosensors, paving the way for highly sensitive detection platforms suitable for next-generation flexible and wearable biosensing applications.

목차

1. 서론

2. 실험 세부 사항

3. 본론

4. 결론

REFERENCES

키워드

Biosensor IGZO Sensitivity Transistor

참고문헌

• Nat Electron
• Science
• Nat Electron
• Sens Actuators B Chem
• Advanced Materials
• Adv Funct Mater.
• Adv Electron Mater.
• ACS Appl. Electron. Mater.
• ACS Sens.
• Sens. Actuat. B Chem.
• ACS Appl. Mater. Interfaces
• ACS Nano
• Adv Electron Mater
• ACS Nano
• Nano Lett.
• Adv Mater Technol
• J. Mater. Chem.
• Advanced Materials
• Biosens Bioelectron
• ACS Nano