주사전자현미경(SEM)과 전자후방산란회절(EBSD)의 구조, 원리, 그리고 미세조직 분석 활용

• 영문명: Principles and Applications of SEM and EBSD for Microstructural Characterisation
• 발행기관: 한국세라믹학회
• 저자명: 진민수(Minsoo Jin) 최벽파(Pyuck-Pa Choi)
• 간행물 정보: 『세라미스트』제28권 제2호, 257~270쪽, 전체 14쪽
• 주제분류: 공학 > 화학공학
• 파일형태: PDF
• 발행일자: 2025.06.30

국문 초록

This paper provides an overview of Scanning electron microscopy (SEM) and Electron backscatter diffraction (EBSD). SEM is an imaging technique that uses a focused electron beam to analyse the surface morphology, chemical composition, and crystallographic characteristics of materials in high resolution. EBSD analyses Kikuchi patterns and enables the extraction of detailed information such as crystallographic orientation, grain boundaries, texture, and local deformation. This work will deliver both theoretical principles and practical applications of SEM and EBSD technologies.

목차

1. 서론

2. 주사전자현미경(SEM)

3. 전자후방산란회절 (Electron backscatter diffraction, EBSD)

4. 결론

REFERENCES

키워드

Electron backscatter diffraction (EBSD) Microstructure chracterisation Scanning electron microscopy (SEM)