Synthesis of IZTO(Indium Zinc Tin Oxide) particle by spray pyrolysis and post-heat treatment and characterization of deposited IZTO film

• 발행기관: 한국응용과학기술학회 (구.한국유화학회)
• 저자명: Seong Taek Lim Sang Hern Kim
• 간행물 정보: 『한국응용과학기술학회지』한국유화학회지 제33권 제4호, 734~740쪽, 전체 7쪽
• 주제분류: 공학 > 화학공학
• 파일형태: PDF
• 발행일자: 2016.12.30

영문 초록

The micron-sized indium zinc tin oxide (IZTO) particles were prepared by spray pyrolysis from aqueous precursor solution for indium, zinc, and tin and organic additives such as citric acid (CA) and ethylene glycol (EG) were added to aqueous precursor solution for indium, zinc, and tin. The obtained IZTO particles prepared by spray pyrolysis from the aqueous solution without organic additives had spherical and filled morphologies, whereas the IZTO particles obtained with organic additives had more hollow and porous morphologies. The micron-sized IZTO particles with organic additives were changed fully to nano-sized IZTO particles, whereas the micron-sized IZTO particles without organic additives were not changed fully to nano-sized IZTO particle after post-treatment at 700 oC for 2 hours and wet-ball milling for 24 hours. Surface resistances of micron-sized IZTO’s before post-heat treatment and wet-ball milling were much higher than those of nano-sized IZTO’s after post-heat treatment and wet-ball milling. From IZTO with composition of 80 wt. % In2O3, 10 wt. % ZnO, and 10 wt. % SnO2 which showed a smallest surface resistance IZTO after post-heat treatment and wet-ball milling, thin films were deposited on glass substrates by pulsed DC magnetron sputtering, and the electrical and optical properties were investigated.

목차

1. Introduction

2. Experimental

3. Results and Discussion

4. Conclusions

References

키워드

IZTO(Indium Zinc Tin Oxide) spray pyrolysis post-heat treatment organic additives transmittance Transparent Conducting Oxide(TCO)