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• 영문명: Removal Process of Metallic Impurity for Silicon Surface Detergent by Ion Exchange
• 발행기관: 한국응용과학기술학회 (구.한국유화학회)
• 저자명: 연영흠(Yeon, Young-Heum) 최성옥(Choi, Seung-Ok) 정환경(Jeong, Hwan-Kyung) 남기대(Nam, Ki-Dea)
• 간행물 정보: 『한국응용과학기술학회지』한국유화학회지 제16권 제1호, 75~81쪽, 전체 7쪽
• 주제분류: 공학 > 화학공학
• 파일형태: PDF
• 발행일자: 1999.03.30

영문 초록

HF purification performance of an ion exchange membrane(IEM) was evaluated with 0.5% HF spiked with 10ppb of Fe, Ni and Cu nitrates. The result show that after less than five turnovers through an IEM, the metallic impurity concentration drops below 1ppb. The decrease rate can be fitted to a model assuming the experimental tanks to be continuously stirred tank reaction and that the metallic impurity concentration after the IEM is a function of the single-pass purification efficiency of the membrane, the concentration before purification and the metals desorbed form the IEM. The Concentration after purification was investigated up to a cumulative Fe loading of 300ppb in the 23 liter recirculated loop. It increases linearly vs. cumulative loading and can be explained by the Langmuir theory resulting in a purification efficiency at the equilibrium of close to 99.5% in this loading regime.