접촉각 측정과 AFM/LFM을 이용한 불화 유기박막의 특성 평가

• 영문명: Characterization of Fluorocarbon Thin Films by Contact Angle Measurements and AFM/LFM
• 발행기관: 한국마이크로전자및패키징학회
• 저자명: 김준성 차남구 이강국 박진구 신형재
• 간행물 정보: 『마이크로전자 및 패키징학회지』제7권 제1호, 35~40쪽, 전체 6쪽
• 주제분류: 공학 > 산업공학
• 파일형태: PDF
• 발행일자: 2000.03.31

영문 초록

Teflon-like fluorocarbon thin film was deposited on various substrates by vapor deposition using PFDA (perfluorodecanoic acid). The fluorocarbon films were characterized by static/dynamic contact angle analysis, VASE (Variable-angle Spectroscopic Ellipsometry) and AFM/LFM (Atomic/Lateral Force Microscopy). Based on Lewis Acid/Base theory, the surface energy (S_{E}) of the films was calculated by the static contact angle measurement. The work of adhesion (WA) between de-ionized water and substrates was calculated by using the static contact data. The fluorocarbon films showed very similar values of the surface energy and work of adhesion to Teflon. All films showed larger hysteresis than that of Teflon. The roughness and relative friction force of films were measured by AFM and LFM. Even though the small reduction of surface roughness was found on film on SiO₂surface, the large reduction of relative friction farce was observed on all films. Especially the relative friction force on TEOS was decreased a quarter after film deposition. LFM images showed the formation of 'strand-like'spheres on films that might be the reason far the large contact angle hysteresis.

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4. 결론 및 요약

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