Compuer에 의한 Gas Sensor의 特性解析

• 발행기관: 호서대학교 사회과학연구소
• 저자명: 朴成熙(Seong Hee Park)
• 간행물 정보: 『사회과학연구』제2집 제1호, 281~293쪽, 전체 13쪽
• 주제분류: 사회과학 > 행정학
• 파일형태: PDF
• 발행일자: 1983.05.31

영문 초록

Gas sensor, oxide metal semiconductor SnO₂, ZnO have been fabricated to thin : film by chemical evaporation method and vacuum evaporation equipment. the sensor sensitivities upon gas (O₂, H₂, Acetone, propane, etc) concentration were inquired and analyzed through computor. the experiment formulas of sensitivity curves are able to request by this computor analysis and analyze all the more the curves. On the other hade, the sensors which appended additions to the original oxide metal semi conductors can make curve sensitivity more better. Then, the fundamental study course for sensor material improvement is demanded still more.

목차

Ⅰ. 諸論

Ⅱ. 薄膜센서의 製造 및 特性 実験

Ⅲ. 測定特性 및 Computer의 특성해석

Ⅳ. 結論

参考文献

SUMMARY