펄스 레이저 증착법을 이용한 Zn₁₋ₓMgₓO 박막의 제작과 특성연구

• 영문명: Preparation and Properties of Zn₁₋ₓMgₓO Thin Films Prepared by Pulsed Laser Deposition Method
• 발행기관: 한국마이크로전자및패키징학회
• 간행물 정보: 『마이크로전자 및 패키징학회지』제12권 제1호, 73~76쪽, 전체 4쪽
• 주제분류: 공학 > 산업공학
• 파일형태: PDF
• 발행일자: 2005.03.31

영문 초록

To widen the band gap of ZnO, we have investigated Zn₁₋ₓMgₓO(ZMO) thin films prepared by pulsed laser deposition on c-plane sapphire substrates at 500℃. From X-ray diffraction patterns, ZMO films show only the (0002) and (0004) diffraction peaks. It means that the flints have the wurtzite structure. Segregation of ZnO and MgO phases is found in the films with x=0.59. All the samples are highly transparent in the visible region and have a sharp absorption edge in the UV region. The shift of absorption edge to higher energy is observed in the films with higher Mg composition. The excitonic nature of the films is clearly appeared in the spectra for all alloy compositions. The optical band-gap (Eg) of ZMO films is obtained from the α² vs Photon energy plot assuming α²∝ (hv - Eg), where u is the absorption coefficient and hv is the photon energy. The value of Eg increases up to 3.72 eV for the films with x=0.35. It is important to adjust Mg composition control for controlling the band-gap of ZMO films.

목차

1. 서론

2. 실험 방법

3. 결과 및 고찰

4. 결론

참고문헌

키워드

ZnMgO ZnO pulsed laser deposition