DPSS UV laser를 이용한 롤 금형 미세가공

• 영문명: Micromachining for Roll Mold Using DPSS UV Laser
• 발행기관: 한국레이저가공학회
• 저자명: 민복기(Bokki Min) 김재구(Jaegu Kim) 조성학(Sunghak Cho) 최두선(Doosun Choi) 황경현(Kyunghyun Whang)
• 간행물 정보: 『한국레이저가공학회 학술대회 논문집』2008년도 춘계학술발표대회 논문집, 3~8쪽, 전체 6쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2008.06.30

영문 초록

This paper presents the method to fabricate a roll mold with microstructure using DPSS(diode pumped solid-states) UV laser. DPSS laser ablation makes it possible to micromachine by controlled energy density and pulse repetition rate of laser. But, In case of metal ablation, molten debris is caused by thermal damage. Hence, We suggest the process of the ablation of a photoresist(PR) coated on roll mold. And we design a roll coater for laminating the photoresist onto the curby surface of a copper roll mold. The microstructure on roll mold is fabricated by controlled laser pulse energy, pulse repetition rate, rotation speed and rotation number of roll. We compare and analyze the quality of microstructure by the wet etching process with the quality by the direct write process.

키워드

DPSS UV Laser Laser ablation(레이저 어블레이션) roll micromachining(롤 미세가공)