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• 영문명: Study on auto focusing system of laser beam by using fiber confocal method
• 발행기관: 한국레이저가공학회
• 저자명: 문성욱(Seong-wook Moon) 김선흠(Sun-hum Kimg) 김종배(Jong-bae Kim) 배한성(Han-seong Bae) 남기중(Gi-jung Nam)
• 간행물 정보: 『한국레이저가공학회 학술대회 논문집』2006년도 추계학술발표대회 논문집, 41~45쪽, 전체 5쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2006.11.01

영문 초록

  Auto focusing system to find optimized focal position of laser beam used for material process has been investigated by using fiber confocal method. Wavelength of laser diode (LD) and diameter of single-mode fiber are 780㎚ and 5.3㎛, respectively. Intensity distributions of beam reflected from the surface of mirror and silicon bare wafer have been observed in a gaussian form. Experimental results show that focal position obtained by LD is shifted from one observed from surface scribed by laser about 80㎛. It is due to the difference of wavelength and each divergence of between LD and laser used for material process. It is confirmed that auto focusing control system through position calibration has operated steadily.

목차

ABSTRACT
1. 서론
2. 실험 방법
3. 결과 및 고찰
4. 결론
5. 참고문헌

키워드

Fiber confocal method auto-focusing LD(laser diode) UV 355nm DPSS laser Si bare wafer