주사 탐침 현미경 기술을 이용한 기능성 박막 및 에너지 소재의 나노스케일 분석

• 영문명: Nanoscale Analysis of Functional Thin Films and Energy Materials Using Scanning Probe Microscopy
• 발행기관: 한국세라믹학회
• 저자명: 김재규(Jaegyu Kim)
• 간행물 정보: 『세라미스트』제28권 제2호, 222~241쪽, 전체 20쪽
• 주제분류: 공학 > 화학공학
• 파일형태: PDF
• 발행일자: 2025.06.30

국문 초록

Scanning probe microscopy (SPM) has emerged as a versatile and powerful tool for nanoscale characterization of functional thin films and energy materials. Beyond topographical imaging via atomic force microscopy (AFM), SPM enables high-resolution mapping of electrical, mechanical, ionic, and magnetic properties, facilitating comprehensive understanding of diverse material systems. This review introduces key SPM techniques―such as lateral force microscopy (LFM), piezoresponse force microscopy (PFM), conductive AFM, electrochemical strain microscopy, and Kelvin probe force microscopy―and highlights their applicability to dielectric thin films, ferroelectric systems, battery composites, and ionic conductors. Advanced multidimensional techniques such as general mode (G-mode) SPM, dual-frequency PFM, and band excitation approaches are also discussed, offering enhanced signal sensitivity and data fidelity. Moreover, emerging developments in tomography SPM, photothermal AFM-based infrared spectroscopy (AFM-IR), and machine learning-based SPM are presented as future directions. This paper provides a comprehensive overview of the contributions of SPM to the precise analysis of structure–property relationships in functional thin films and energy materials at the nanoscale.

목차

1. 서론

2. SPM 원리

3. 대표적인 접촉 모드 SPM

4. 대표적인 AC 모드 SPM

5. 다중 채널 및 다중 신호 기반 고차원 SPM 분석 기술

6. SPM의 확장 기술 및 응용

7. SPM의 한계점 및 보완 기술

8. 결론 및 전망

REFERENCE

키워드

Electromechanics Energy materials Nanoscale characterization Scanning probe microscopy Surface science