높은 전자 이동도의 바륨 스테네이트 박막 증착 최적화와 전자 이동도 극대화 열처리 공정 개발

• 영문명: Optimization of High Electron Mobility Barium Stannate Thin Film Deposition and Development of Thermal Treatment for Electron Mobility Maximizatio
• 발행기관: 한국세라믹학회
• 저자명: 윤다섭(Daseob Yoon)
• 간행물 정보: 『세라미스트』제28권 제1호, 92~105쪽, 전체 14쪽
• 주제분류: 공학 > 화학공학
• 파일형태: PDF
• 발행일자: 2025.03.31

국문 초록

Using pulsed laser deposition, the synthesis of epitaxial La-doped BaSnO₃ (LBSO) thin films was optimized by controlling plasma plume dynamics with parameters such as pressure, laser energy, and target-substrate distance. This allowed precise tuning of the Ba/Sn ratio, ultimately leading to LBSO films with high electron mobility and carrier density. During post-growth hydrogen annealing, precise control of oxygen partial pressure and temperature simultaneously increased electron density and mobility, achieving a room-temperature mobility of 130 cm V⁻ s⁻ . While hydrogen annealing could potentially reduce mobility due to charged oxygen vacancies, careful regulation of oxygen partial pressure increased the electron mobility significantly. This improvement was primarily attributed to oxygen-vacancy-assisted recovery in the ionic lattice, which induces reduced threading dislocation density and crystal mosaicity. Furthermore, this research provided a comprehensive guideline for defect engineering through thermal treatment. While reducing conditions improved crystallinity and mobility, they also induced Sn vacancy formation, which strongly trapped free electrons. Therefore, slightly Sn-excess LBSO films were found to be optimal for maximizing room-temperature mobility after hydrogen annealing. This study utilized LBSO thin films as a model system to explore defect control during synthesis and post-treatment, investigating the correlation between defect engineering and electronic properties. The findings highlight that thermodynamic defect control strategies during film deposition and annealing can offer new pathways to enhance room-temperature electron mobility in epitaxial oxide thin films.

목차

1. 서론

2. 본론

3. 결론

ACKNOWLEDGEMENTS

REFERENCES

키워드

Alkaline-earth stannate Defect control Pulsed laser deposition Thermal treatment