차세대 반도체 소자용 세라믹 박막의 전기적 분석 방법 리뷰

• 영문명: Review of Electrical Characterization of Ceramic Thin Films for the Next Generation Semiconductor Devices
• 발행기관: 한국세라믹학회
• 저자명: 이동현(Donghyun Lee) 양건(Kun Yang) 박주용(Ju-Yong Park) 박민혁(Min Hyuk Park)
• 간행물 정보: 『세라미스트』제22권 제4호, 332~349쪽, 전체 18쪽
• 주제분류: 공학 > 화학공학
• 파일형태: PDF
• 발행일자: 2019.12.30

영문 초록

Ceramic thin films are key materials for fundamental electronic devices such as transistors and capacitors which are highly important for the state-of-the-art electronic products. Their characteristic dielectric properties enable accurate control of current conduction through channel of transistors and stored charges in capacitor electrodes. The electronic conduction in ceramic thin films is one of the most important part to understand the electrical properties of electronic device based on ceramic thin films. There have been numerous papers dealing with the electronic conduction mechanisms in emerging ceramic thin films for future electronic devices, but these studies have been rarely reviewed. Another interesting electrical characterization technique is one based on electrical pulses and following transient responses, which can be used to examine physical and chemical changes in ceramic thin films. In this review, studies on various conduction mechanisms through ceramic thin films and electrical characterization based on electric pulses are comprehensively reviewed.

목차

1. 서론

2. 전류-전압 특성 기반 전도 메커니즘 분석

3. Electric pulse를 이용한 전기적 분석 방법

4. 결론

참고문헌

키워드

Electrical characterization Ceramic Thin films Conduction mechanism Pulse measurement