주사전자현미경을 활용한 세라믹의 분석

• 영문명: Analysis of Ceramics Using Scanning Electron Microscopy
• 발행기관: 한국세라믹학회
• 저자명: 이수정(Sujeong Lee)
• 간행물 정보: 『세라미스트』제22권 제4호, 368~380쪽, 전체 13쪽
• 주제분류: 공학 > 화학공학
• 파일형태: PDF
• 발행일자: 2019.12.30

영문 초록

A ceramic is used as a key material in various fields. Accordingly, the use of scanning electron microscopy is increased for the purpose of evaluating the reliability and defects of advanced ceramic materials. The scanning electron microscope is developed to overcome the limitations of optical microscopy and uses accelerated electrons for imaging. Various signals such as SE, BSE and characteristic X-rays provide useful information about the surface microstructure of specimens and, the content and distribution of chemical components. The development of electron guns, such as FEG, and the improved lens system combined with the advanced in-lens detectors and STEM-inSEM system have expanded the applications of SEM. Automated SEM-EDS analysis also greatly increases the amount of data, enabling more statistically reliable results. In addition, X-ray CT, XRF, and WDS, which are installed in scanning electron microscope, have transformed SEM a more versatile analytical equipment. The performance and specifications of the scanning electron microscope to evaluate ceramics were reviewed and the selection criteria for SEM analysis were described.

목차

1. 서론

2. 주사전자현미경의 원리

3. 전자빔-시료의 상호작용

4. 세라믹 시료의 준비법

5. 자동화된 SEM-EDS 분석법

6. 주사전자현미경의 선택

참고문헌

키워드

Ceramic SEM Microstructure Performance Specifications