이차이온질량분석기의 원리와 분석법 동향

• 영문명: Secondary Ion Mass Spectrometry : Theory and Recent trends
• 발행기관: 한국세라믹학회
• 저자명: 변미랑(Mirang Byeon) 김다영(Da Young Kim) 홍태은(Tae Eun Hong)
• 간행물 정보: 『세라미스트』제22권 제4호, 357~367쪽, 전체 11쪽
• 주제분류: 공학 > 화학공학
• 파일형태: PDF
• 발행일자: 2019.12.30

영문 초록

Secondary Ion Mass Spectrometry(SIMS) is an analytical method that measures the distribution and concentration of elements or compounds by analyzing the mass of secondary ions released by irradiating ion beams with energy of hundreds eV to 20 keV on the sample surface. Unlike other similar analytical instruments, SIMS directly detect the elemental ions that constitute a sample, allowing you to accurately identify components and obtain concentration information in the depth direction. It is also a great feature for measuring isotopes and analyzing light elements, especially hydrogen. In particular, with the development of materials science, there is an increasing demand for trace concentration analysis and isotope measurements in the micro-regions of various materials. SIMS has a short history compared to other similar methods; nevertheless, SIMS is still advancing in hardware and is expected to contribute to the development of materials science through research and development of advanced analytical techniques.

목차

1. 서론

2. 본론

3. 결론

참고문헌

키워드

Secondary Ion Mass Spectrometry Analytical method Ion Microprobe