A Study on the Magnetic and Electrical Properties of Al-Co/AIN-Co

• 발행기관: 호서대학교 공업기술연구소
• 저자명: Chang-Hwan Bae
• 간행물 정보: 『공업기술연구 논문집』제32권 제2호, 23~30쪽, 전체 8쪽
• 주제분류: 공학 > 공학일반
• 파일형태: PDF
• 발행일자: 2013.12.30

영문 초록

Annealing techniques were applied to induce phase transformations and phase separations in AIN-Co thin films containing various amounts of Co content and AIN-Co/Al-Co multilayer thin films having different layer thicknesses, prepared by a two-facing-target type dc sputtering (TFTS) system. X-ray diffraction and electron diffraction techniques were used to examine the behavior of phase transformations and phase separations, and transmission electron microscopy were also used to evaluate the microstructural changes in the films. Magnetization and resistivity of the films were evaluated by VSM and four-probe method respectively. It was found that magnetization and resistivity were very sensitive to the phase transformations and phase separations as well as the changes in the microstructure of the films.

목차

I. INTRO DUCTION

II. EXPERIM ENTAL PRO CED UR ES

III. RESULTS AND DISCU SSIO N

IV. CONCLUSION

키워드

phase transformations AIN-Co thin films AIN-Co/Al— Co multilayer films microstructure magnetization resistivity