펨토초 레이저에 의한 PDMS 가공 특성

• 영문명: Micromachined Properties of a PDMS by femtosecond laser
• 발행기관: 한국레이저가공학회
• 저자명: 민철기(Chulki, Min) 이만섭(Manseop Lee)
• 간행물 정보: 『한국레이저가공학회 학술대회 논문집』2008년도 춘계학술발표대회 논문집, 134~139쪽, 전체 6쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2008.06.30

영문 초록

The surface treatment of PDMS (polydimethylsiloxane) by femtosecond laser can help the accurate and fine fabrication of microstructure. Very small beam power is enough to make dots or lines on th PDMS' surface. We put femto second laser single pulse, and multi pulses on PDMS with different power and/or repetition rates to make dots, lines and rectangular or square type surface treatments. Pulse patterning is stable and almost least unwanted surface damage is shown.