나노초 가시광 레이저 펄스를 이용한 사파이어 미세천공 공정의 해석

• 영문명: Analysis of Sapphire Microdrilling by a Nano Second Visible Laser Pulse
• 발행기관: 한국레이저가공학회
• 저자명: 오부국(Bukuk Oh) 정영대(Youngdae Jung) 김남성(Namsung Kim) 김동식(Dongsik Kim)
• 간행물 정보: 『한국레이저가공학회지』한국레이저가공학회지 제12권 제1호, 7~13쪽, 전체 7쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2009.03.30

영문 초록

Engineering ceramics as sapphire are widely used in industry owing to their superior mechanical and corrosion properties. However, micromachining of sapphire is a considerable challenge due to its transparency. Recently, direct ablation of sapphire has been demonstrated with a visible laser pulse at sufficiently high laser intensity. In this work, the theoretical model for pulsed laser ablation of sapphire is suggested and numerical analysis is carried out using the model. Sapphire ablation begins with plasma generation by the laser interaction with surface defects, impurities and contaminations in the initial stage of machining. Subsequent absorption of the visible laser beam can be explained by three mechanisms: metalization of sapphire surface due to the EUV radiation from the hot plasma, increments of surface roughness and temperature-dependent absorption coefficient. Comparison of the computation results with experimental observation indicates that the proposed model of sapphire is reasonable.

목차

ABSTRACT

1. 서론

2. 가시광 레이저에 의한 사파이어 어블레이션 기작

3. 수치해석모델

4. 실험

5. 결과

6. 결론

후기

참고문헌

키워드

Micromachining Nd:YAG laser pulsed laser ablation sapphire