간격제어가 가능한 레이저유도 에칭기술을 이용한 금속채널의 제조

• 영문명: Manufacture of metallic channels by using laser-assisted etching technique with gap control
• 발행기관: 한국레이저가공학회
• 저자명: 임현덕(H. D. Im) 오광환(Kwang H. Oh) 정성호(S. H. Jeong)
• 간행물 정보: 『한국레이저가공학회 학술대회 논문집』2007년도 추계학술발표대회 논문집, 52~56쪽, 전체 5쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2007.11.30

영문 초록

  A new laser-assisted etching technique with gap control between a fiber tip and a workpiece is introduced. The gap control system consisting of a laser diode and a position sensitive detector controls the gap to make uniform shape and size microchannels. By using the etching technique, microchannels with triangular cross-section are fabricated, and the shape and size of microchannels are analyzed to evaluate the gap control system. The gap control system correctly worked according to the analysis, and hence it is expected that the proposed etching technique can be applied to the fabrication of micro devices based on microchannels.

목차

ABSTRACT
1. 서론
2. 본론
3. 결론
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