펨토초 레이저에 의한 미세 회절패턴 제작

• 영문명: Diffractive patterning on metal thin film using femtosecond laser pulses
• 발행기관: 한국레이저가공학회
• 저자명: 김재구(Jaegu Kim) 조성학(Sunghak Cho) 장원석(Wonseok Chang) 나석주(Suck-Joo Na) 황경현(Kyunghyun Whang)
• 간행물 정보: 『한국레이저가공학회 학술대회 논문집』2007년도 춘계학술발표대회 논문집, 134~139쪽, 전체 6쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2007.06.30

영문 초록

  Micromachining of metals with femtosecond laser has the different laser-matter interaction comparing to long pulse laser because there is not enough time during the femtosecond pulse for significant heat conduction to occur. We suggested the processing methods of the usage of mask which makes Gaussian spatial beam distribution to a normalized distribution by Fresenel diffraction, and fabricated the holography pattern generated by the IFTA algorithm on Cr thin film on glass substrate with a pixel size of 5×5 ㎛². We analysed the damage threshold with an assumption the power distribution as Gaussian profile as 45 mJ/㎠, This processing method is expected to get higher machining quality of metal film used in industrial fields such as 2-D bar code, MEMS patterning, mask repairing, etc.

목차

ABSTRACT
1. 서론
2. 실험방법
3. 결과 및 고찰
4. 결론
참고문헌

키워드

Femtosecond Laser(펨토초 레이저) Holography pattern(홀로그래피 패턴) Thin film ablation(박막가공)