하이브리드형 AFM/SCM을 이용한 레이저 미세 가공 표면 측정

• 영문명: Precision measurement of a laser micro-processing surface using a hybrid type of AFM/SCM
• 발행기관: 한국레이저가공학회
• 저자명: 김종배(Jong-Bae Kim) 김경호(Kyeong Ho Kim) 배한성(Han Sung Bae) 남기중(Gi-jung Nam) 이대철(Dae-Chul Lee) 서운학(Woon-Hak Seo)
• 간행물 정보: 『한국레이저가공학회 학술대회 논문집』2006년도 추계학술발표대회 논문집, 123~127쪽, 전체 5쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2006.11.01

영문 초록

  Hybrid type microscope with a Scanning Confocal Microscope (SCM) and a shear-force Atomic Force Microscope (AFM) is suggested and preliminarily studied. A image of 120×120㎛² is obtained within 1 second by SCM because scan speed of a X-axis and Y-axis are 1㎑ and 1㎐, respectively. Shear-force AFM is able to correctly measure the bight and width of sample with a resolution 8nm. However, the scan speed is slow and it is difficult to distinguish a surface composed of different kinds of materials. We have carried out the measurement of total image of a sample by SCM and an exact analysis of each image by shear-force AFM.

목차

ABSTRACT
1. 서론
2. 실험 방법
3. 결과 및 고찰
4. 결론
5. 참고 문헌

키워드

Hybrid type microscope Scanning confocal microscopr Shear-force Atomic Force Microscope