렌즈형 광섬유가 레이저유도 에칭된 미세홈 구조에 미치는 영향

• 영문명: Effect of a lensed fiber on the laser-induced etched microgroove structure
• 발행기관: 한국레이저가공학회
• 저자명: 오광환(Kwang .H. Oh) 임현덕(H. D. Im) 정성호(S. H. Jeong)
• 간행물 정보: 『한국레이저가공학회 학술대회 논문집』2007년도 춘계학술발표대회 논문집, 140~143쪽, 전체 4쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2007.06.30

영문 초록

  A new laser-assisted etching technique for the fabrication of high-aspect-ratio metallic grooves using the optical fiber is introduced. Microgroove fabricated with this technique has a clear shape clarity and surface quality. Manufacture of a narrower and deeper groove is achieved by simple connection of the lensed fiber and deep groove with the maximum aspect ratio of 12 can be obtained. The fabrication and characterization of grooves with varying process conditions is closely demonstrated with the proposed technique.

목차

ABSTRACT
1. 서론
2. 본론
3. 결론
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