엑시머 레이저를 이용한 PDMS 트랜스퍼 몰드의 제작

• 영문명: Development of PDMS Transfer Mold using Excimer Laser
• 발행기관: 한국레이저가공학회
• 저자명: 신동식(D. S. Shin) 이제훈(J. H. Lee) 서정(J. Suh)
• 간행물 정보: 『한국레이저가공학회 학술대회 논문집』2006년도 추계학술발표대회 논문집, 96~102쪽, 전체 7쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2006.11.01

영문 초록

  In this study, manufacturing of polymer master, PDMS(poly dimethylsiloxane) transfer mold, and mold insert was investigated for laser LIGA(LIthography Galvanoformung Abformtechnik). Initially, ablation by excimer laser radiation was used successfully to make 3-D microstructure of PET. After then, the PDMS transfer mold was replicated using ablated PET. Finally, epoxy resin tooling on replicated PDMS transfer mold was executed for making mold insert. From these facts we can conclude that excimer laser ablation of polymer and fabricaiton of PDMS transfer mold are reasonable tools to substitute for X-ray lithography of LIGA process in microstructuring.

목차

ABSTRACT
1. 서론
2. 실험방법
3. 실험 결과 및 고찰
5. 결론
6. 참고문헌

키워드

excimer laser(엑시머레이저) mold insert(금형) transfer mold(트랜스퍼 몰드) master(모형) rapid tooling(래피드 툴링)