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• 영문명: Microhole fabrication on alumina ceramic substrate using femtosecond laser ablation
• 발행기관: 한국레이저가공학회
• 저자명: 김성훈(S. h. Kim) 손익부(I. B. Sohn) 노영철(Y. C. Noh) 이종민(J. M. Lee) 정성호(S. h. Jeong)
• 간행물 정보: 『한국레이저가공학회 학술대회 논문집』2007년도 춘계학술발표대회 논문집, 36~39쪽, 전체 4쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2007.06.30

영문 초록

  Microdrilling of alumna ceramic with good edge clarity and roundness using a femtosecond laser micromachining system is reported. The fabrication of microholes with sub-hundred micrometer in diameter often results in a poor quality hole due to the accumulation of sub-microparticles. To avoid the deterioration of hole quality with decreasing hole size, the condition of blowing air and laser beam interval for repeated ablation are controlled. Also, the results when Galvano scan mirror with telecentric lens is used for beam steering and when translation stages with a stationary objective lens is used for patterning are compared. Improvement of hole shape and drilling of small through holes are realized with process optimization.

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ABSTRACT
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