Phase Changes in Transition Metal-Carbon Alloy Films (M-C; M=Fe, M, Co) Prepared by Co-Sputtering Deposition Technique

• 발행기관: 호서대학교 공업기술연구소
• 저자명: Chang -Hwan Bae
• 간행물 정보: 『공업기술연구 논문집』제31권 제1호, 15~20쪽, 전체 6쪽
• 주제분류: 공학 > 제어계측공학
• 파일형태: PDF
• 발행일자: 2012.06.30

영문 초록

Transition metal-carbon alloy films, such as Fe-C, Co-C and Ni-C alloys, were prepared by a new type of co-sputtering deposition technique. Their phase changes caused by annealing were examined together with decomposition behavior. The formation ability and thermal stability of metastable phases, such as cobalt and nickel carbides, are explained by the difference in the fcffmation enthalpy for carbides. After annealing, graphite particles were always seen to grow around metal particles decomposed from carbides, probably due to the so-called metal-mediated nucleation and growth. Common features of the phase changes including decomposition behavior are also explained based on the same concept, partly taking account of subsequent dissociation of carbon from the carbides during annealing.

목차

I. INTRODUCTION

II. EXPERIMENTAL PROCEDURES

I. INTRODUCTION

IV. CONCLUSION

키워드

Phase Change Metal-Carbon Alloy Film Transition Metal Annealing Co-Sputtering Magnetic Property