Resonant MEMS

Oliver Brand , Isabelle Dufour , Stephen Heinrich , Fabien Josse , Gary K. Fedder 지음

Wiley-VCH 2015년 04월 28일 출간

작품소개

책소개

이 책은 과학/기술분야 외국도서입니다.

목차

PART I. FUNDAMENTALS Fundamental Equations Fluid/Structure Interaction Damping Viscoelasticity Material Properties Finite Element Modeling of Resonators PART II. IMPLEMENTATION Capacitive Devices Piezoelectric Devices Thermal Devices NanoDevices Organic Devices Device with Embedded Channels Packaging Tuning and Stability PART III. APPLICATIONS Inertial Sensors Chemical Sensors Biosensors Fluid Properties Sensors Timing Devices Energy Harvesting Devices

인물정보

저자(글) Oliver Brand

Oliver Brand is Professor of Bioengineering and Microelectronics/Microsystems at Georgia Institute of Technology, Atlanta, USA. He received his diploma degree in Physics from Technical University Karlsruhe, Germany, in 1990, and his PhD from ETH Zurich, Switzerland, in 1994. Between 1995 and 2002, he held research and teaching positions at the Georgia Institute of Technology (1995-1997) and ETH Zurich (1997-2002). Oliver Brand's research interest lies in the areas of CMOS-based micro- and nanosystems, MEMS fabrication technologies, and microsystem packaging.Isabelle Dufour is Professor of Electrical Engineering at the University of Bordeaux, France. She received the PhD and habilitation degrees in Engineering Sciences from the University of Paris-Sud, Orsay, France, in 1993 and 2000, respectively. Isabelle Dufour was a CNRS research fellow from 1994 to 2007, first in Cachan working on the modeling of electrostatic actuators such as micromotors and micropumps and after 2000 in Bordeaux working on microcantilever-based chemical sensors. Her research interests are mainly in the areas of sensors for chemical detection, rheological measurements and materials characterization.Stephen M. Heinrich is Professor of Civil Engineering at Marquette University, Wisconsin, USA. He earned his MSc and PhD degrees from the University of Illinois after which he joined the faculty at Marquette University. Stephen Heinrich's research is focused on structural mechanics applications in microelectronics packaging and the development of new analytical models for predicting and enhancing the performance of cantilever-based chemical sensors. The work performed by Stephen Heinrich and his colleagues has resulted in over 100 publications and presentations and three best-paper awards from IEEE and ASME.Fabien Josse is Professor in the Department of Electrical and Computer Engineering and the Department of Biomedical Engineering at M

저자(글) Isabelle Dufour

저자(글) Stephen Heinrich

저자(글) Fabien Josse

저자(글) Gary K. Fedder