Atomic Layer Deposition of Nanostructured Materials

Nicola Pinna 지음

Wiley-VCH 2012년 09월 19일 출간

작품소개

책소개

Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays with perfect structure and process controllability. Nowadays, creating nanomaterials and producing nanostructures with structural perfection is an important goal for many applications in nanotechnology. As ALD is one of the important techniques which offers good control over the surface structures created, it is more and more in the focus of scientists. The book is structured in such a way to fi t both the need of the expert reader (due to the systematic presentation of the results at the forefront of the technique and their applications) and the ones of students and newcomers to the fi eld (through the first part detailing the basic aspects of the technique).This book is a must-have for all Materials Scientists, Surface Chemists, Physicists, and Scientists in the Semiconductor Industry.

목차

Foreword VPreface XVIIIntroduction XXIList of Contributors XXXIIIPart One Introduction to ALD 11 Theoretical Modeling of ALD Processes 3Charles B. Musgrave1.1 Introduction 31.2 Overview of Atomistic Simulations 31.3 Calculation of Properties Using Quantum Simulations 101.4 Prediction of ALD Chemical Mechanisms 131.5 Example of a Calculated ALD Mechanism: ALD of Al2O3 Using TMA and Water 16References 202 Step Coverage in ALD 23Sovan Kumar Panda and Hyunjung Shin2.1 Introduction 232.2 Growth Techniques 242.3 Step Coverage Models in ALD 282.4 Experimental Verifications of Step Coverage Models 342.5 Summary 38References 383 Precursors for ALD Processes 41Matti Putkonen3.1 Introduction 413.2 General Requirements for ALD Precursors 423.3 Metallic Precursors for ALD 423.4 Nonmetal Precursors for ALD 493.5 Conclusions 50References 514 Sol&~Gel Chemistry and Atomic Layer Deposition 61Guylhaine Clavel, Catherine Marichy, and Nicola Pinna4.1 Aqueous and Nonaqueous Sol&~Gel in Solution 614.2 Sol&~Gel and ALD: An Overview 634.3 Mechanistic and In Situ Studies 70References 765 Molecular Layer Deposition of Hybrid Organic&~Inorganic Films 83Steven M. George, B. Yoon, Robert A. Hall, Aziz I. Abdulagatov, Zachary M. Gibbs, Younghee Lee, Dragos Seghete, and Byoung H. Lee5.1 Introduction 835.2 General Issues for MLD of Hybrid Organic&~Inorganic Films 855.3 MLD Using Trimethylaluminum and Ethylene Glycol in an AB Process 875.4 Expansion to an ABC Process Using Heterobifunctional and Ring-Opening Precursors 895.5 Use of a Homotrifunctional Precursor to Promote Cross-Linking in an AB Process 935.6 Use of a Heterobifunctional Precursor in an ABC Process 965.7 MLD of Hybrid Alumina&~Siloxane Films Using an ABCD Process

작가정보

저자(글) Nicola Pinna

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Nicola Pinna studied physical chemistry at the Universite' Pierre et Marie Curie (Paris). He received his PhD in 2001, and in 2002, he moved to the Fritz Haber Institute of the Max Planck Society (Berlin). In 2003, he joined the Max Planck Institute of Colloids and Interfaces (Potsdam). In 2005, he moved to the Martin Luther University, Halle-Wittenberg, as an Assistant Professor of Inorganic Chemistry. Since 2006 he is researcher at the Department of Chemistry and CICECO of the Universityof Aveiro and since 2009 he is also Assistant Professor at the School of Chemical and Biological Engineering of the Seoul National University. In 2011 he was ranked among the top 100 materials scientists of the past decade by impact. His research activity is focused on the development of novel routes to nanostructured materials, their characterization, and the study of their physical properties.Mato Knez studied chemistry at the University of Ulm in Germany. He did his dissertation at the Max Planck Institute of solid state research in Stuttgart from 2000-2003. In 2003 he joined the Max Planck Institute for Microstructure Physics in Halle as a Postdoc where he established the ALD-based research direction. Since 2006 he is leading a research group funded by the German Ministry of Education and Research (BMBF). In January 2012 he will join CIC nanoGUNE in San Sebastian (Spain) as an Ikerbasque Research Professor. His research activities are mainly focused on various aspects of the application of ALD, including the synthesis of optical nanolaminates, infi ltration mechanisms when ALD is applied to soft materials, and ALD-assisted nanofabrication of photonic and plasmonic structures. Aside from ALD he has strong research activites in biotemplated inorganic nanostructures for applications in nanotechnology and medicine.