Mechanics of Microsystems

Alberto Corigliano , Raffaele Ardito , Claudia Comi , Attilio Frangi , Aldo Ghisi 지음

Wiley 2017년 11월 20일 출간

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Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.

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Series Preface xiii Preface xv Acknowledgements xvii Notation xix About the Companion Website xxiii 1 Introduction 1 1.1 Microsystems 1 1.2 Microsystems Fabrication 3 1.3 Mechanics in Microsystems 5 1.4 Book Contents 6 References 7 Part I Fundamentals 9 2 Fundamentals of Mechanics and Coupled Problems 11 2.1 Introduction 11 2.2 Kinematics and Dynamics of Material Points and Rigid Bodies 12 2.2.1 Basic Notions of Kinematics and Motion Composition 12 2.2.2 Basic Notions of Dynamics and Relative Dynamics 15 2.2.3 One-Degree-of-Freedom Oscillator 17 2.2.4 Rigid-Body Kinematics and Dynamics 22 2.3 Solid Mechanics 25 2.3.1 Linear Elastic Problem for Deformable Solids 26 2.3.2 Linear Elastic Problem for Beams 35 2.4 Fluid Mechanics 43 2.4.1 Navier Stokes Equations 43 2.4.2 Fluid Structure Interaction 48 2.5 Electrostatics and Electromechanics 49 2.5.1 Basic Notions of Electrostatics 49 2.5.2 Simple Electromechanical Problem 54 2.5.3 General Electromechanical Coupled Problem 58 2.6 Piezoelectric Materials in Microsystems 60 2.6.1 Piezoelectric Materials 60 2.6.2 PiezoelectricModelling 62 2.7 Heat Conduction and Thermomechanics 64 2.7.1 Heat Problem 64 2.7.2 Thermomechanical Coupled Problem 67 References 70 3 Modelling of Linear and NonlinearMechanical Response 73 3.1 Introduction 73 3.2 Fundamental Principles 74 3.2.1 Principle of Virtual Power 74 3.2.2 Total Potential Energy Principle 74 3.2.3 Hamilton’s Principle 75 3.2.4 Specialization of the Principle of Virtual Powers to Beams 76 3.3 Approximation Techniques andWeighted Residuals Approach 76 3.4 Exact and Approximate Solutions for Dynamic Problems 79 3.4.1 Free Flexural Linear Vi

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저자(글) Alberto Corigliano

Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi, and Stefano Mariani Politecnico di Milano, Italy Alberto Corigliano is a Professor of Solid and Structural Mechanics at the Department of Civil and Environmental Engineering of Politecnico di Milano, Italy. A. Corigliano has authored and co-authored more than 240 scientific publications in fields related to solid and structural mechanics at various scales, including 2 book chapters in Microsystems area, and 7 patents on Microsystems. During his research activity, A. Corigliano covered a wide range of subjects in the fields of structural and materials mechanics, with particular reference to theoretical and computational problems relevant to non-linear material responses. Raffaele Ardito is an Associate Professor of Solid and Structural Mechanics at the Department of Civil and Environmental Engineering of Politecnico di Milano, Italy. He graduated in 2000 (cum laude) at the Politecnico di Milano in Civil Engineering and he received the Ph.D. degree, cum laude, in 2004. From 2004 to 2006 he was a research fellow at the National Institute for Nuclear Physics, joining an international research group with focus on solid mechanics in cryogenic conditions. He spent, in 2008 and 2010, two periods of research at the Research Laboratory of Electronics, Massachusetts Institute of Technology, as visiting scientist. His scientific contributions to the field of MEMS focus on theoretical and computational aspects of adhesion and multi-physics behavior. Claudia Comi is a Professor of Solid and Structural Mechanics at the Department of Civil and Environmental Engineering of Politecnico di Milano, Italy. C. Comi has authored and co-authored more than 140 scientific publications in various fields of solid and structural mechanics and 4 patents on Microsystems. Her main research interests concern theoretical and computational mechanics of materials and str

저자(글) Raffaele Ardito

저자(글) Claudia Comi

저자(글) Attilio Frangi

저자(글) Aldo Ghisi