Contamination and ESD Control in High Technology Manufacturing

Roger W. Welker 지음

Wiley-IEEE Press 2006년 08월 04일 출간

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A practical quot;how toquot; guide that effectively deals with the control of both contamination and ESDThis book offers effective strategies and techniques for contamination and electrostatic discharge (ESD) control that can be implemented in a wide range of high-technology industries, including semiconductor, disk drive, aerospace, pharmaceutical, medical device, automobile, and food production manufacturing. The authors set forth a new and innovative methodology that can manage both contamination and ESD, often considered to be mutually exclusive challenges requiring distinct strategies.Beginning with two general chapters on the fundamentals of contamination and ESD control, the book presents a logical progression of topics that collectively build the necessary skills and knowledge:Analysis methods for solving contamination and ESD problemsBuilding the contamination and ESD control environment, including design and construction of cleanrooms and ESD protected environmentsCleaning processes and the equipment needed to support these processesTooling design and certificationContinuous monitoringConsumable supplies and packaging materialsControlling contamination and ESD originating from peopleManagement of cleanrooms and ESD protected workplace environmentsContamination and ESD Control in High-Technology Manufacturing conveys a practical, working knowledge of contamination and ESD control strategies and techniques, and it is filled with case studies that illustrate key principles and the benefits of contamination and ESD control. Moreover, its straightforward style makes the material, which integrates many disciplines of engineering and science, clear and accessible.Written by three leading industry experts, this book is an essential guide for engineers and designers across the many industries where contamination and ESD control is a concern.

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PREFACE.1 FUNDAMENTALS OF CONTAMINATION CONTROL.1.1 Introduction.1.2 Glossary of Contamination Control Terms.1.3 Specifying Contamination in Air and on Surfaces.1.4 Sources of Contamination.1.5 Contamination Control Requirements.1.6 Pertinent Standards.References and Notes.Additional Reading.2 FUNDAMENTALS OF ESD CONTROL.2.1 Introduction and Historical Perspective.2.2 Glossary of Electrostatic Charge Control Terms.2.3 Sources of Electrostatic Charge.2.4 Requirements of ESD Control.2.5 Building the ESD-Safe Workplace.2.6 ESD Controls for People.2.7 Consumables and Accessories.2.8 Personnel Equipment and Procedures for Its Use.2.9 Transportation of ESD-Sensitive Products.2.10 Inspections and Record Keeping.2.11 ESD Control Program.2.12 ESD and Contamination Control.2.13 Useful Reference Standards.References and Notes.3 SAMPLING AND ANALYSIS METHODS.3.1 Introduction.3.2 Classification of Analysis Methods.3.4 Organic Contamination Analysis Methods.3.5 Ionic and Inorganic Contamination Analysis Methods.3.6 Electrostatic Discharge Methods.3.7 Numerical Simulation.3.8 Algebraic Predictive Modeling.3.9 Statistical Analysis Methods.Additional Reading.References and Notes.4 FACILITIES DESIGN: CONTAMINATION- AND ESD-SAFE WORK AREAS.4.1 Introduction.4.2 Basics of Cleanroom Design.4.3 Cleanrooms.4.4 Cleanroom Construction and Operating Costs.4.5 Modern Energy-Saving Approaches.4.6 Other Design Considerations.References and Notes.5 GETTING CLEAN PARTS AND GETTING PARTS CLEAN.5.1 Introduction.5.2 Historical Perspective.5.3 Gross and Precision Cleanliness Protocols.5.4 Design for Manufacturability and Cleanability.5.5 Process Design Guidelines.5.6 Cleaning Processes.5.7 Drying Processes.5.8 Cost of Cleaning.5.9 Vendor Process Contamination Checklist.5.10 Case Studies: Cleaning Equi

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저자(글) Roger W. Welker

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ROGER W. WELKER is founder and Principal Scientist at R. W. Welker Associates, an independent consulting firm specializing in complex contamination, electrostatic discharge, and quality control issues. His technical expertise is in manufacturing technology, cleanroom and ESD protected workplace management, cleaning process development, analysis, and statistics.R. NAGARAJAN, PhD, is Professor in the Department of Chemical Engineering at the Indian Institute of Technology, Madras. He has fifteen years' RD experience in contamination control and chemical integration with IBM's Storage Systems Division inSan Jose, California.CARL E. NEWBERG is President and Director of Laboratory Operations for River's Edge Technical Service/MicroStat Laboratories.